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Chinese scientists create solid-state DUV laser sources for chipmaking tools
The Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from commercialization.
Digi Times15d
Chinese researchers develop solid-state 193nm DUV laser targeting advanced chipmaking
Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...