Figure 2: The lens for DUV photolithography with the highest NA: Starlith 1900 from Carl Zeiss ... lithography yet further, and these will now be discussed. The current maximum NA for projection ...

Deep ultraviolet (DUV) lasers, known for their high photon energy and short wavelengths, are essential in various fields such as semiconductor lithography, high-resolution spectroscopy ...

have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor lithography. Although still in the early research phase ...