But you probably wouldn't have guessed another major reason is mirrors. More specifically, the insanely perfect mirrors ...

There is also the question of how to generate EUV light. As mentioned above, the mirrors in the projection ... the power output of the source, this collector must have good spectral filtering ...

The most significant of these are the efficiency of the EUV production, the reflectivity of mirrors and the continuous, high-repetition rate operation of lithography systems. The best tin-based ...

This wavelength will be incompatible with existing EUV infrastructure and require ... extending the lifespan of critical parts like collectors and protective pellicles. The design also allows ...