In e-beam lithography, or EBL, shapes are drawn onto a wafer using an electron beam in a vacuum chamber. This is a slow process compared to optical lithography, as used in mass production ...

Extreme ultraviolet lithography extends photolithography ... a single fingerprint on the wall of the vacuum chamber could put the whole system out of specification. These practices must be applied ...

It works by firing 50,000 droplets of molten tin into a vacuum chamber. Each droplet takes ... To build these tiny features, a lithography machine works in stages by etching patterns of ...