Until recently, ASML was still permitted to sell DUV systems like the Twinscan NXT:2000i. SMIC has modified these devices to produce 7nm chips, and some reports have claimed 5nm is possible.

However, ASML kept shipping advanced DUV lithography tools, such as the Twinscan NXT:2000i, which are capable of producing chips on 5nm and 7nm-class process technologies. As a result, SMIC has ...