South China Morning Post notes that SiCarrier grabbed headlines in 2023 with a patent for making 5nm chips using DUV tools—a breakthrough linked to Huawei’s 7nm chip in the Mate 60 Pro. According to ...

Detecting sub-5nm defects creates huge challenges for chipmakers, challenges that have a direct impact on yield, reliability, and profitability. In addition to being smaller and harder to detect, ...

Persistent Link: https://ieeexplore.ieee.org/servlet/opac?punumber=6570653 ...