Instead, SMIC pushed forward using brute-force DUV techniques, squeezing every nanometer out of aging tools. According to Huo, this involved stacking multiple lithography and etching steps ...

The most advanced sub-5nm silicon nodes require the latest EUV (extreme ultraviolet) lithography tools like the one above, but Chinese chipmakers are stuck with DUV (deep ultraviolet) lithography.

ASML has translated this technological edge into a near-total monopoly in lithography, with no competitors able to match its technological capabilities. This dominance extends to DUV lithography, ...

Companies like ASML, the Dutch firm holding a monopoly on advanced deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography machines, have been barred from selling their most sophisticated ...

China's latest technological breakthroughs in homegrown deep ultraviolet (DUV) lithography machines mark a significant milestone in the country's semiconductor manufacturing equipment sector ...

Amid circulating rumors that China has developed an 8nm lithography machine, industry experts are clarifying the actual state of China's lithography technology progress. Debunking China's first ...

ZEISS SMT) EUV lithography allowed us to make a big turn of the wavelength knob. It uses 13.5 nm light, compared to 193 nm for the highest-resolution DUV systems. The first pre-production EUV ...