ASML is the sole producer of cutting-edge EUV lithography machines for advanced 3nm chip manufacturing. How secure is that ...

Extreme-ultraviolet (EUV) lithography at 13.5 nm is expected to be introduced in high-volume semiconductor chip production over the next three years. Research is now underway to investigate sub-10 ...

In EUV lithography, and especially high-numerical-aperture EUV, balancing tradeoffs between resolution, sensitivity and line-width roughness is becoming increasingly difficult. Lithography patterning ...

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The semiconductor industry is rethinking the manufacturing flow for extreme ultraviolet (EUV) lithography in an effort to improve the overall process and reduce waste in the fab. Vendors currently are ...

Craig Child, who also worked at GlobalFoundries, was named director of the CHIPS for America Extreme Ultraviolet Accelerator ...

The Global Market for EUV ... than older lithography methods. The ability to minimize feature sizes allows chips to pack more transistors, boosting performance without enlarging footprints.

We develop instrumentation and strategies for applications with the most challenging requirements in the High Tech Industry, including EUV lithography. The goal is to mitigate both particulate and ...

Using this zoneplate technology, AIRES produces an ultra-high magnification image of the photomask with a significantly smaller physical footprint ... the next leap in EUV lithography, EUV Tech ...